THERMO / NESLAB

STEELHEAD 0

Thermo Neslab Steelhead 0 AMAT Thermal Fluid Recirculating Heat Exchanger

***This unit is sold as-is, where-is. It is untested.***

Typical Semiconductor Applications:
  Dry etch - plasma (e.g. RF/Microwave)
  Wet etch
  Dry deposition (e.g. CVD, SACVD, PVD)
  Wet deposition (e.g. ECP)
  Ion implantation
  Plasma asher
  Planarization

Components:
  Chamber walls
  Cathodes
  Domes
  Upper/lower electrodes
  Chucks/disks
  Ozone generators
  Cleaning baths and plating tanks
  RF power supplies

Reliable Performance:
  Proven quality
  Extended DI life
  Next Generation AMAT 0

Description:
The heat exchange system consists of a thermal fluid recirculating system which provides a constant fluid flow. A second loop consists of a facilities water loop which recirculates through a plate heat exchanger for fluid cooling. A 6 kilowatt heater is located in the fluid recirculating system.

The recirculating fluid loop has a deionizing package with a replaceable cartridge and a 20 micron particulate filter with a replaceable filter element. (cartridges not provided unless shown)

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THERMO / NESLAB

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THERMO / NESLAB

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THERMO / NESLAB

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THERMO / NESLAB

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