CENTROTHERM

E2000

Horizontal diffusion furnace for POCl3 doping

The centrotherm diffusion furnace offers the best available phospho­rus diffusion and allows a solid realization of high emitter resistivity. The design supports the multiple process capability needs for the manufacturing of crystalline solar cells with maximum capacity and excellent process performance. The unique advantages of the batch-type system are the high flexibility towards varying production load and process sequence as well as the continued operation in case of tube maintenance or shut-down. Various configurations regarding process capability, capacity and automation level are available. Diffusion on both wafer sides (extended gettering effect of phosphorus improves material quality) Short cycle time and high availability due to redundancy.

Highest cleanness (gas phase diffusion without residues)
System configuration adjustable to production capacity (number of tubes, optional back-to-back loading)
Fully automated boat handling guarantees maximized tube utilization
Modular design allows easy installation and start-up
4 independently operated stacked quartz tube reactor chambers
No thermal interference between different tubes due to advanced water cooling system
Optionally available for low pressure processes
Minimized facility heat load reduces cost of ownership
Processes Diffusion (POCl3, BBr3) Annealing Wet and dry oxidation (optional: DCE, HCl)

Centrotherm.mov

Centrotherm1.mov

Centrotherm_E2000_Datasheet.pdf

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6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

E2000

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CENTROTHERM

E2000

CENTROTHERM

E2000

CENTROTHERM

E2000

CENTROTHERM

E2000

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