CANON acquired ANELVA and became CANON ANELVA Corporation which focuses on: Vacuum thin-film deposition and processing equipment, semiconductor device manufacturing equipment, storage device manufacturing equipment, equipment for electronic device manufacturing and for R&D, maintenance service, and vacuum components.


System configuration: Cluster type
Substrate: φ100mm, φ150mm
Main pump: Turbo Moleculer Pump (TMP)
Electric power: 3φ AC200V±10% 125A 50/60Hz
Cooling water: 30〜34L/min 0.2〜0.3MPa 15〜30℃
Compressed air: 0.5〜0.8MPa
Process Gas: 0.15〜0.4MPa
Throughput: 3.5min/set (It varies according to a process condition)
Weight: 3720kg (Main body)
Footprint: W3300mm×D5100mm (standard specification)

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