CENTURA ENABLER ETCH
Category
Plasma EtchOverview
The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot. To address advanced low k etch applications, the Applied Centura Enabler Etch system performs etch, strip and clean steps in a single chamber. The Enabler’s all-in-one capability streamlines the process flow for advanced chip designs and significantly reduces operating costs. Enabler Chamber: 300mm only.
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20
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- CENTURA ENABLER ETCHPlasma EtchVintage: 2007Condition: UsedLast Verified16 days ago
- CENTURA ENABLER ETCHPlasma EtchVintage: 2007Condition: UsedLast Verified16 days ago
- CENTURA ENABLER ETCHPlasma EtchVintage: Condition: UsedLast Verified23 days ago
- CENTURA ENABLER ETCHPlasma EtchVintage: Condition: UsedLast VerifiedOver 30 days ago
- CENTURA ENABLER ETCHPlasma EtchVintage: 2006Condition: UsedLast VerifiedOver 60 days ago
- CENTURA ENABLER ETCHPlasma EtchVintage: 2006Condition: UsedLast VerifiedOver 60 days ago
- CENTURA ENABLER ETCHPlasma EtchVintage: 2008Condition: UsedLast VerifiedOver 60 days ago
- CENTURA ENABLER ETCHPlasma EtchVintage: 2008Condition: UsedLast VerifiedOver 60 days ago