SPTS LPX APS is a wafer processing system designed for research and development applications in the semiconductor industry. It combines a manually loaded, single-wafer vacuum load-lock with SPTS's etch or deposition plasma sources, providing a cost-effective platform for R&D purposes. 


Previously under Orbotech that KLA acquired in 2019.

SPTS Technologies provides advanced wafer processing solutions to the world's leading semiconductor and microelectronic device manufacturers. We make electronics possible.

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

LPX APS

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