J.A. WOOLLAM

VUV-VASE (GEN II)

VUV-VASE VU302 (GEN I)

IR-VASE

VUV-400-R03

IR-VASE MARK II

The RC2® design builds on 25 years of experience. It combines the best features of previous models with innovative new technology: dual rotating compensators, achromatic compensator design, advanced light source and next-generation spectrometer design. The RC2 is a near-universal solution for the diverse applications of spectroscopic ellipsometry.

ALPHA 2.0

The theta-SE is a fully integrated spectroscopic ellipsometer designed for efficient and accurate measurement of film thickness and optical properties. With features such as 300 mm sample mapping, a small-spot measurement beam, fast sample alignment, a look-down camera, and the latest Dual-Rotation ellipsometer technology, it provides everything needed for spatial uniformity assessment.

Its high-speed capabilities, including fast point-to-point translation and continuous data collection through Dual-Rotation ellipsometer technology, optimize sample throughput. Despite its powerful features, the theta-SE remains compact, thanks to the patented Dual-Theta rotation stage, allowing full 300 mm mapping in a small, table-top instrument with a footprint just slightly larger than a 300 mm wafer.

User-friendly automation, along with built-in reporting, ensures easy operation with quick access to measurement results. Moreover, the theta-SE offers affordability without compromising on the power of spectroscopic ellipsometry and 300 mm uniformity mapping.

ThetaSE

VUV-VASE VU-303

M-2000

245-1000nm, 470 wavelengths
Ideal for many thin films: dielectrics, organics,
semiconductors, metals, and more. Measure optical
constants and thickness for coatings from subnanometer to tens of microns.

M-2000U

VUV-VASE 400R02

VASE

M 2000X

J.A. WOOLLAM

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VUV-VASE (GEN II)

VUV-VASE VU302 (GEN I)

IR-VASE

IR-VASE MARK II

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