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6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
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6" Fab For Sale from Moov - Click Here to Learn More
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Marketplace > Dry / Plasma Etch > KLA / SPTS > PRIMAXX MONARCH 300

PRIMAXX MONARCH 300

Overview

The Primaxx® Monarch300 is a fully integrated, automated VHF etch tool designed to perform selective MEMS etch release via a controlled anhydrous HF/Alcohol etch process. The process provides a vapor phase, isotropic etch of sacrificial oxide to release a flexure or other device. No liquids are used in contact with these MEMS devices and therefore “stiction” creating conditions are avoided. A clean, residue-free release etch is accomplished without liquids or supercritical drying. Compatible with 200mm & 300mm wafers High throughput, high uptime 13-wafer batch processing Process chamber, gas/liquid panel, and pressure/vacuum components, all within a small footprint

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