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RADIANTSTRIP 320
Category
Dry / Plasma EtchOverview
The platform is ideally suited to the demands of high-volume memory manufacturing, where the need for tool reliability and versatility is at a premium. Axcelis designed the RadiantStrip 320 for dependability and productivity in high-volume, low cost-of-ownership manufacturing environments. The machine offers a modular and scalable platform for bulk photoresist strip, advanced polymer removal and complete dry clean processes in the same chamber.
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