CENTURA DPS
Category
Dry / Plasma EtchOverview
The AMAT Centura DPS is a highly efficient semiconductor processing system with a unique architecture that groups four processing stations and two auxiliary chambers around a central transfer module housing an ultra-reliable magnetically-coupled vacuum robot. It is designed for ≤200mm wafer fabrication and supports various applications such as Chemical Vapor Deposition (CVD), epitaxy, etch, plasma nitridation, and Rapid Thermal Processing (RTP).
Active Listings
12
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APPLIED MATERIALS (AMAT)
CENTURA DPS
Dry / Plasma EtchVintage: 2006Condition: UsedLast VerifiedOver 60 days agoAPPLIED MATERIALS (AMAT)
CENTURA DPS
Dry / Plasma EtchVintage: 2013Condition: UsedLast VerifiedOver 60 days agoAPPLIED MATERIALS (AMAT)
CENTURA DPS
Dry / Plasma EtchVintage: 2001Condition: UsedLast VerifiedOver 60 days agoAPPLIED MATERIALS (AMAT)
CENTURA DPS
Dry / Plasma EtchVintage: Condition: Parts ToolLast VerifiedOver 60 days ago
APPLIED MATERIALS (AMAT)
CENTURA DPS
Dry / Plasma EtchVintage: 1997Condition: UsedLast VerifiedOver 30 days agoAPPLIED MATERIALS (AMAT)
CENTURA DPS
Dry / Plasma EtchVintage: 2010Condition: UsedLast VerifiedOver 60 days agoAPPLIED MATERIALS (AMAT)
CENTURA DPS
Dry / Plasma EtchVintage: 1997Condition: UsedLast VerifiedOver 60 days agoAPPLIED MATERIALS (AMAT)
CENTURA DPS
Dry / Plasma EtchVintage: 2007Condition: UsedLast VerifiedOver 60 days ago