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TEL / TOKYO ELECTRON TELINDY
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    TEL / TOKYO ELECTRON

    TELINDY

    Created: February 14, 2022

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    Last Verified: Over 60 days ago

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    Key Item Details

    Condition: As Is

    Product ID: 52720

    Wafer Sizes: 12"/300mm

    Vintage: Unknown

    Description

    Furnace

    Configuration

    LT ALD SiN Indy-I-L

    Other Information
    No Other Information Provided
    OEM Model Description

    TELINDY™ is an innovative thermal processing system for 300mm wafer which has all the functionality of high-reliable ALPHA-303i and TELFORMURA™ that enables short TAT thermal processing. Newly designed heater and process chamber expands its performance up to 125 wafers in a batch and provides various process applications with overwhelming throughput. Successor to Alpha 303i, improved interface and expanded capacity to 125 wafer batches.

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