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TEL / TOKYO ELECTRON TELINDY
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:64347

    Wafer Sizes:12"/300mm

    Vintage:Unknown

    Description

    No description available

    Configuration

    TELINDY Anneal

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    OEM Model Description

    The TELINDY is a 300mm wafer processing platform that combines the advantages of the TELFORMULA and ALPHA(α)-303i platforms to meet the demands of high-volume thermal processing for sub-45nm technology. It offers a large 125-wafer batch size, high-speed robotics, and other improvements for cost-effective processing of various oxidation and deposited films. The TELINDY platform is suitable for a range of applications, including general oxidation/anneal, radical oxidation, LPCVD films, ultra-low temperature LPCVD applications, and high-k dielectrics. It features in-situ dry gas cleaning technology, a fast ramp-up and cool-down heater, high-speed robotics, and a large 125-wafer load size. These features make the TELINDY an excellent choice for cost-effective and efficient wafer processing.

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