TEL / TOKYO ELECTRON
TELINDY
Diffusion and Oxidation Furnaces
Vintage: 2013
Condition: As-Is
Last Verified
Over 60 days ago
TELINDY™ is an innovative thermal processing system for 300mm wafer which has all the functionality of high-reliable ALPHA-303i and TELFORMURA™ that enables short TAT thermal processing. Newly designed heater and process chamber expands its performance up to 125 wafers in a batch and provides various process applications with overwhelming throughput. Successor to Alpha 303i, improved interface and expanded capacity to 125 wafer batches.
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Diffusion and Oxidation Furnaces
Diffusion and Oxidation Furnaces
Diffusion and Oxidation Furnaces
Diffusion and Oxidation Furnaces
Diffusion and Oxidation Furnaces
Diffusion and Oxidation Furnaces
Diffusion and Oxidation Furnaces
Diffusion and Oxidation Furnaces