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TEL / TOKYO ELECTRON ALPHA(α)-303i
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:65735

    Wafer Sizes:12"/300mm

    Vintage:2005

    Description

    No description available

    Configuration

    TEL Alpha303i Furnace 1. 300mm Production with Max production 125 Pcs 2. 2 IO Port ,16 Carrier Stock 3. Waves System CTL , Temp CTL M560 4. Heater Type : VOS series , 4 Zone / PID CTL / 600 – 1000 Deg+-1Deg 5. Fork Transfer with 5+1 6. 2 Boat 7. RCU Unit 8. Gas :N2 FTP Anneal Furnace.

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    OEM Model Description

    The Alpha-303i is a 300mm production tool developed by Tokyo Electron. It is the result of years of research and development, with TEL having completed their 300mm batch furnace prototype in 1995. Since then, TEL has delivered numerous atmospheric and LP CVD systems to multiple customer sites and consortia worldwide. The Alpha-303i includes key features such as a 100 product wafer load size, a high-speed multiple-wafer loading system with optical notch alignment, and a Front-Opening Unified Pod (FOUP) interface that is configurable for overhead transfer systems (OHT) and personal guided vehicles (PGV). Additionally, boat rotation is standard on all processes, and a Fast Thermal Processing System (FTP) is available for both atmospheric and CVD systems. This tool reinforces TEL’s commitment to being production ready for the 300mm era of semiconductor manufacturing.

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