MECHATRONIC

mWS-200/300t

Mechatronic Sorter for 200 and 300mm

With Bernoulli Aligner for 8 and 12 inch and IOSS Camera.

And greenlight inspection.

With 4 Synfoniy 300mm Loadports, 2 on the front side and 2 on the backside.

Cassette to Cassette: YES

Other Information

Tool was in production until 19 October 2021

Condition: Excellent

Year of Manufacture: 2012

CE Marked: YES

TECHNICAL SPEC

• Wafer sizes：200mm（8”）and 300mm（12”）
• Sorting of two wafer sizes in one machine
• Handling of standard，TAIKO，thin and warped wafers
• Optimized footprint
• Highest product and operator safety
• High throughput（up to 201 wafers / hour）
• End - effectors with mapping function
• Wafer flipping function
• Green light visual inspection via joystick and defect marking on touch panel
• Wafer - ID reader for barcode，OCR，data matrix code，T7 optional
• RFID reader for FOUP - / cassette - ID optional
• SECS / GEM optional
• Integrated FFU for better cleanroom class optional
• UPS（uninterruptible power supply）optional
• Cleanroom class 5（ISO EN 14 644 - 1）
• CE certificated
• SEMI standards compliant 

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mWS-200/300t

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