B30 is a tool that uses darkfield, brightfield, and color imaging to detect 2D defects on the backside of wafers. It is incorporated into the Explorer Cluster for enhanced functionality.

Onto Innovation is a worldwide leader in the design, development, manufacture and support of process control tools that perform macro defect inspections and metrology, lithography systems, and process control analytical software used by semiconductor wafer and advanced packaging device manufacturers. 

B30

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