The ICOS WI-2250 system's automated optical inspection capabilities enable higher quality LED and MEMS products at increased yields. The new system will allow defect inspection of whole and diced wafers up to 200mm, with macro inspection sensitivity in the pre- and post-dice inspection (i.e., front- and back-end) of high-brightness (HB) LEDs and MEMS wafers. 

KLA-Tencor to acquire Belgium's ICOS Vision Systems
ICOS's primary business is the design and manufacture of inspection equipment for semiconductor packaging and interconnect applications. ICOS's systems also perform inspection of solar wafers and solar cells at different stages of production enabling solar manufacturers to effectively monitor the production process. The inspection modules allow fast, efficient and reliable optical classification of solar cells at the different stages of the production flow.

KLA / ICOS

WI-2250

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Macroscopic detection
No missing parts
Current Wafer size : 12

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KLA / ICOS

WI-2250

KLA / ICOS

WI-2250

KLA / ICOS

WI-2250

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