The first multiple e-beam (multibeam) wafer inspection system for in-line defect inspection applications.
Following in the footsteps of the eScan 1000, the eScan 1100 offers new levels of efficiency in high throughput wafer inspection.

ASML to acquire HMI to enhance Holistic Lithography product portfolio.

HMI has been committed to the research and development of the most advanced E-beam Inspection (EBI) tools and solutions for the leading semiconductor manufacturing fabs. Today, HMI is the leading supplier of EBI tools for both foundry and memory fabs worldwide. Based on our proprietary electron gun and column technologies and highly effective defect inspection algorithms, we deliver multiple product lines, including eScan® Series / ePTM Series / eXplore® Series, for various R&D and production applications.

eScan 1100

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