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PS600S
Category
Defect InspectionOverview
The TherMoiré® PS600S is a metrology solution that utilizes the Shadow Moiré measurement technique combined with automated phase-stepping to characterize out-of-plane displacement for samples up to 600 mm x 600 mm. With time-temperature profiling capability, the TherMoiré® PS600S captures a complete history of a sample’s behavior during a user-defined thermal excursion.
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