Semes have achieved growth centering on cleaning, etching, and photo-track equipment used in the semiconductor manufacturing process. Also, the advancement has been shown in such sectors as test & package, semiconductor logistics automation equipment, and display OLED.

SEMES

LOZIX

Excluded Items List (Pumps, Chillers & Abatement are all excluded)

Asset Description LOZIX
Software Version 2.0.2.3 GA(G) 2016.5.17
CIM SECS GEM
Process SOH

SEMES LOZIX Configuration.pdf

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 4 Cup + 12 UHP + 8 CP 4 Cup + 12 UHP + 8 CP

SEMES LOZIX 6 Cup + 12 SHP + 8 CP 6 Cup + 12 SHP + 8 CP SEMES LOZIX 6 Cup + 12 SHP + 8 CP 6 Cup + 12 SHP + 8 CP

LOZIX

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LOZIX

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LOZIX

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SEMES

LOZIX

SEMES

LOZIX