Description
GammaNet V2.0 Used for SU8 process (coating and development) Developer : Still in production Coating : Initialization not possible due to a problem with the dispending module Hot-plates / cool plate : doors are not workingConfiguration
Configured for 150mm wafers 1x Coater 1x developer 2x cool-plates 1x hot-plate NO chillerOEM Model Description
None ProvidedDocuments
No documents
CATEGORY
Coaters & Developers
Last Verified: Over 30 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
128422
Wafer Sizes:
6"/150mm
Vintage:
2003
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SUSS MicroTec / KARL SUSS
GAMMA 60
CATEGORY
Coaters & Developers
Last Verified: Over 30 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
128422
Wafer Sizes:
6"/150mm
Vintage:
2003
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
GammaNet V2.0 Used for SU8 process (coating and development) Developer : Still in production Coating : Initialization not possible due to a problem with the dispending module Hot-plates / cool plate : doors are not workingConfiguration
Configured for 150mm wafers 1x Coater 1x developer 2x cool-plates 1x hot-plate NO chillerOEM Model Description
None ProvidedDocuments
No documents