Novellus acquired Gasonics in 2001. Novellus now offers a suite of advanced photoresist strip and clean products.

LAM RESEARCH / NOVELLUS / GASONICS

The GAMMA Express, introduced in 2006, is a high productivity resist strip system designed to meet the technology requirements for 45 nanometer manufacturing. GAMMA Express performs high dose implant strip (HDIS) and incorporates non-oxidizing processes for advanced silicides and low-k dielectric films. The redesigned GAMMA Express platform offers a new direct-drive wafer handling subsystem, as well as a new high ash rate source.

LAM RESEARCH / NOVELLUS / GASONICS

GAMMA EXPRESS

Ashers / Plasma Cleaner

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GAMMA EXPRESS

Ashers / Plasma Cleaner

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