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LAM RESEARCH / NOVELLUS / GASONICS GAMMA EXPRESS
  • LAM RESEARCH / NOVELLUS / GASONICS GAMMA EXPRESS
  • LAM RESEARCH / NOVELLUS / GASONICS GAMMA EXPRESS
  • LAM RESEARCH / NOVELLUS / GASONICS GAMMA EXPRESS
Description
Stripper/Asher
Configuration
No Configuration
OEM Model Description
The GAMMA Express, introduced in 2006, is a high productivity resist strip system designed to meet the technology requirements for 45 nanometer manufacturing. GAMMA Express performs high dose implant strip (HDIS) and incorporates non-oxidizing processes for advanced silicides and low-k dielectric films. The redesigned GAMMA Express platform offers a new direct-drive wafer handling subsystem, as well as a new high ash rate source.
Documents

No documents

CATEGORY
Ashers / Plasma Cleaner

Last Verified: Over 30 days ago

Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

30953


Wafer Sizes:

12"/300mm


Vintage:

Unknown


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

LAM RESEARCH / NOVELLUS / GASONICS

GAMMA EXPRESS

verified-listing-icon
Verified
CATEGORY
Ashers / Plasma Cleaner
Last Verified: Over 30 days ago
listing-photo-d3153505e81b497db90ba5d9e78092ea-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

30953


Wafer Sizes:

12"/300mm


Vintage:

Unknown


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Stripper/Asher
Configuration
No Configuration
OEM Model Description
The GAMMA Express, introduced in 2006, is a high productivity resist strip system designed to meet the technology requirements for 45 nanometer manufacturing. GAMMA Express performs high dose implant strip (HDIS) and incorporates non-oxidizing processes for advanced silicides and low-k dielectric films. The redesigned GAMMA Express platform offers a new direct-drive wafer handling subsystem, as well as a new high ash rate source.
Documents

No documents