Description
ETCH Dry Etching MachineConfiguration
Engraving point; 18 pieces/furnace; maximum 1800W; robot transfer pieceOEM Model Description
The Aura 1000 is an advanced dry chemistry processing system for photoresist removal, manufactured by GaSonics. It incorporates the company’s proprietary microwave downstream processing technology and is designed to be used in the fabrication of ICs with feature sizes of 0.25 microns and below. The system provides a lower cost of ownership solution for advanced IC manufacturers and has a throughput rate ranging from approximately 45 to 55 wafers per hour, depending on wafer size and customer application.Documents
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LAM RESEARCH / NOVELLUS / GASONICS
A1000
Verified
CATEGORY
Ashers / Plasma Cleaner
Last Verified: 20 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
66570
Wafer Sizes:
6"/150mm
Vintage:
1991
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / NOVELLUS / GASONICS
A1000
CATEGORY
Ashers / Plasma Cleaner
Last Verified: 20 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
66570
Wafer Sizes:
6"/150mm
Vintage:
1991
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
ETCH Dry Etching MachineConfiguration
Engraving point; 18 pieces/furnace; maximum 1800W; robot transfer pieceOEM Model Description
The Aura 1000 is an advanced dry chemistry processing system for photoresist removal, manufactured by GaSonics. It incorporates the company’s proprietary microwave downstream processing technology and is designed to be used in the fabrication of ICs with feature sizes of 0.25 microns and below. The system provides a lower cost of ownership solution for advanced IC manufacturers and has a throughput rate ranging from approximately 45 to 55 wafers per hour, depending on wafer size and customer application.Documents
No documents