GEMINI GPS
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Ashers / Plasma CleanerOverview
The Fusion Gemini GPS is a UV Cure System made by Axcelis / Fusion. It has two 8" open cassette stations and a process chamber mWave PS: HV-SMPS. The system software (OS) is WinNT 4.0 SP 6 and the system software (App) is version 3.43.
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