June 24, 2016 - FormFactor Completes Acquisition of Cascade Microtech
FormFactor, Inc. (NASDAQ: FORM) helps semiconductor manufacturers test the integrated circuits (ICs) that power consumer mobile devices, as well as computing, automotive and other applications. The company is one of the world’s leading providers of essential wafer test technologies and expertise, with an extensive portfolio of high-performance probe cards for DRAM, Flash and SoC devices. Cascade Microtech’s leading-edge stations, probes, probe cards, advanced thermal subsystems and integrated systems deliver precision accuracy and superior performance both in the lab and during production manufacturing of high-speed and high-density semiconductor chips.

FORM FACTOR / CASCADE MICROTECH / FRT

MICROPROF 200

XY-Table: 250 mm x 200mm travel range with a pneumatic brake.
Base: Granite base plate on air-damping elements with vibration damping and level regulation.
Sensors: Motorized linear axis for sensor approach (min. 50 mm travel).
Hardware/Software: Includes video observation (LED), housing, monitor arm, measurement PC, and acquisition/image analysis software.
Tilting Table: Two-axis tilting table with a specific hole pattern.

Sensors and Objectives-
Surface Sensor: Combined Confocal Microscope (CFM) and White Light Interferometer (WLI) with a 6-position objective nosepiece.
NIR Thin Film Sensor: Spectrometer for the 900–1700 nm spectral range, capable of measuring up to 10 layers (including 2 substrate layers) and accounting for interface roughness.
Objective Specifications:
| Objective | Type | Vert. Resolution | Lat. Resolution | Field of View |
| :--- | :--- | :--- | :--- | :--- |
| 20x CFM | Confocal | 3 nm  | 1.16 µm  | 890 x 655 µm  |
| 50x CFM | Confocal | 2 nm  | 0.42 µm  | 356 x 267 µm  |
| 100x CFM | Confocal | 1 nm  | 0.37 µm  | 178 x 134 µm  |
| 50x WLI | Mirau | 0.1 nm  | 0.61 µm  | 356 x 267 µm  |

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 Automatic film stress measuring instrument

 Tool does have TSV. Tool doesn’t have a TTV (total thickness variation) function.

MICROPROF 200

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FORM FACTOR / CASCADE MICROTECH / FRT

MICROPROF 200

FORM FACTOR / CASCADE MICROTECH / FRT

MICROPROF 200

FORM FACTOR / CASCADE MICROTECH / FRT

MICROPROF 200

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