Description
No descriptionConfiguration
CD Performance: -Static accuracy: 3σ (%) < 1.1% -Dynamic accuracy: 1.2nm (3σ) -Throughput (9 sites): 14 wph -Minimum pattern spacing (dense configuration): 40nm Depth Performance: -Static accuracy 3σ (%) < 0.4% -Dynamic accuracy: 0.5nm (3σ) -Minimum pattern spacing (dense configuration): 30nm 3D Imaging: Max scan size 49X49µm Noise 0.1nm RMSOEM Model Description
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BRUKER
INSIGHT 3DAFM
Verified
CATEGORY
AFM
Last Verified: 17 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
118263
Wafer Sizes:
12"/300mm
Vintage:
2009
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
BRUKER
INSIGHT 3DAFM
CATEGORY
AFM
Last Verified: 17 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
118263
Wafer Sizes:
12"/300mm
Vintage:
2009
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
CD Performance: -Static accuracy: 3σ (%) < 1.1% -Dynamic accuracy: 1.2nm (3σ) -Throughput (9 sites): 14 wph -Minimum pattern spacing (dense configuration): 40nm Depth Performance: -Static accuracy 3σ (%) < 0.4% -Dynamic accuracy: 0.5nm (3σ) -Minimum pattern spacing (dense configuration): 30nm 3D Imaging: Max scan size 49X49µm Noise 0.1nm RMSOEM Model Description
None ProvidedDocuments
No documents