VEECO

RF351 C2 IBE

VEECO / COMMONWEALTH SCIENTIFIC

38JG

ATC-1800-IM-R utilizing a 14cm, gridded, RF ion source for uniform, reactive milling of a 100mm Ø substrate and features a 2000 l/s turbopump, computer control, retractable faraday cup, load-lock with sputter gun for passivation layers, and a substrate holder with motorized tilting, heating/cooling (5-200°C).  This tool is also compatible with Cl gas and includes a (4) MFC hazardous gas box.

AJA is a manufacturer of thin film deposition systems including magnetron sputtering, e-beam evaporation, thermal evaporation, and ion milling systems.

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RF351 C2 IBE

38JG

ATC-1800-IM-R

IBE 1201