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TEL / TOKYO ELECTRON UW-200Z
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:36805

    Wafer Sizes:Unknown

    Vintage:2005

    Description

    No description available

    Configuration

    PROCESS: HF, NOE etch Citric POU SD2 Dryer

    Documents
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    OEM Model Description

    The UW200Z is a state-of-the-art automated wet station designed for advanced front-end-of-line (FEOL) cleans, etch, and resist strip in 300mm and 200mm wafer mass production environments. It achieves high productivity through reduced dry time and the ability to process multiple chemistries in a single point-of-use bath. The system is also designed for low cost of ownership, with reduced requirements for deionized water, chemicals, and exhaust. It is compliant with SECS/GEM host communication, S2-0200 and CE mark compliance, and FM compliance. The UW200Z also features a stacked dual chamber dryer (SD2) with in-situ chemical injection for process flexibility and watermark-less drying performance. Overall, the UW200Z offers a versatile and efficient solution for advanced wafer processing.

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