ULVAC

ENTRON-EX2  W300

ENTRON N300

The SIV inline system is a PVD tool that can deposit LCO, LPO and ITO onto panels with a substrate size of up to 1,000mm x 1,000mm. The maximum substrate size is 500mm. It has an RTA module integrated and a special designed chamber for LCO and LPO deposition. The tool is equipped with a special cathode for particle reduction and can deliver high quality/density LCO/LPO target. The system can perform pass-by or continuous deposition and can also deposit ITO.

SIV-200S

SME-200J

ENTRON-EX W200S

SMD 450C

ENTRON EX

STD-1500VR

SH-450

SRH 820

EI-OPT

SRH-420MC

SIH-300RD	

SIV-500	

SCH-135T

SDH-4550L

SV-4540

SMD-650C

SCH-135A

SH-350H

SMD-1800X

Standard exhaust system: 12” Cryopump
Ultimate pressure: 6.7e-5Pa
Depot direction: side
Deposition Area Uniformity Stationary Rotation: L300mm±10%	

SV-6040

ULTECH-4543

SH-700M-C12

MPS-4000-L4(SP)

SV-9040-T14

The CS-200 is a sputtering system equipped with a 4-inch Magnetron cathode for various target materials. It is suitable for research and development, as well as small and medium-scale volume production. The system is designed for high-performance and high reliability sputtering, based on ULVAC’s extensive experience and sputtering technology portfolio. It is an ideal choice for those looking for a reliable and versatile sputtering system.

CS-200

MAGEST S200

MUE-ECO

IBS-6000

ULDIS-200UCP

EBV-6CH

SV-9040

EBV-6DA

SRH-420z

MPS-2000

SV-9045

SH-450-C10

SPW-020

The MLX-3000N is a multi-chamber sputtering system that offers a flexible modular configuration with up to 5 process chambers and a random access robotic wafer transfer. It includes a unique dual pole, electromagnetic sputter source, a low damage high-rate etch-cleaning, and a new wafer heating method. These features, combined with improved process technology for R&D production, make the MLX-3000N a flexible and versatile system for various applications.

ULVAC

Overview

Active Listings

Total Products

Services

Top ULVAC Sputter

ENTRON-EX2 W300

6 Listings

ENTRON N300

5 Listings

SIV-200S

4 Listings

SME-200J

4 Listings

List it with Moov and find the perfect buyer in no time at all.

All ULVAC Sputter