"The LLS EVO
has a rate compensation feature enabling
consistent film thickness over the entire
life of the target; the Unaxis LLS EVO produces 70% more
wafers per target."

EVATEC / BALZERS 

LLS EVO

LLS 802

RADIANCE 

LLS-801

LLS 900

The LLS EVO II is the flexible load lock platform for deposition of metals, TCOs and magnetic films with a
whole host of new features that enhance productivity and reduce materials consumption. Whether its new
oval cathode technology for reduced materials costs and particles, next generation magnet systems for
enhanced target life, or the new high speed pumping solution, the new LLS EVO II platform raises yields and
lowers production costs.

EVATEC / BALZERS

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LLS EVO

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LLS 802

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RADIANCE

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LLS-801

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