The Accura XT is an advanced focused ion beam (FIB) mask repair system designed for repairing defects on today's most complex masks including MoSiON embedded phase shift, alternating phase shift, chrome binary, and optical proximity correction (OPC) feature masks. The Accura XT enables advanced masks to reach production more rapidly at reduced cost.

Thermo Fisher Scientific Inc. (NYSE: TMO), the world leader in serving science, today announced that it has completed its acquisition of FEI Company, Inc. (NASDAQ: FEIC), the leader in high-performance electron microscopy. FEI and Philips joined their technologies in 1993 to create the first DualBeam (FIB/SEM) workstation.

ACCURA XT

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