The Accura™ 850 is an advanced focused ion beam (FIB) mask repair system designed for repairing defects on most complex masks including chrome, phase shift, alternating phase shift, and optical proximity correction (OPC) feature masks. This system enables advanced masks to get to production faster and with reduced costs.

Thermo Fisher Scientific Inc. (NYSE: TMO), the world leader in serving science, today announced that it has completed its acquisition of FEI Company, Inc. (NASDAQ: FEIC), the leader in high-performance electron microscopy. FEI and Philips joined their technologies in 1993 to create the first DualBeam (FIB/SEM) workstation.

ACCURA 850

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