Previously under Orbotech that KLA acquired in 2019.

SPTS Technologies provides advanced wafer processing solutions to the world's leading semiconductor and microelectronic device manufacturers. We make electronics possible.

The SPTS Sigma FxP is a physical vapor deposition (PVD) system for 4-12" power device manufacturing. Applications fo the SPTS Sigma FxP include frontside thick Al and thin wafer backside processing. The Sigma fxP carries thin wafer handling hardware and uses film deposition stress control techniques to deliver high throughput processes with low wafer bow. Sigma fxP - a cluster system supporting up to 6 PVD chambers (including associated pre-clean/degas module options). The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.

KLA / SPTS

SIGMA fxP

The MVD300® (and MVD300E with an EFEM) are designed for high performance, flexibility and reliability for the most demanding high volume manufacturing applications.

MVD300E

SPTS’ Delta PECVD systems are used for a wide range of applications within MEMS, compound semiconductors, and advanced packaging industries, particularly in applications where a low processing temperature is required. They are also used in the advanced packaging, RF, power, photonics and MEMS markets.

DELTA 201

The MVD4500 is our panel and large substrate tool. It is capable of handling multiple substrates with sizes up to 930 x 720 mm. It is the only batch process tool capable of performing ALD and MVD on substrates in this size range. It is designed for high performance, flexibility and reliability for the most demanding high volume manufacturing applications.

MVD4500

The MVD100E is the designated tool for R&D or pilot manufacturing. It is designed for high performance, flexibility and reliability for the most demanding applications. Corporate and academic research labs have called it their most versatile and reliable piece of equipment.

KLA / SPTS

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SIGMA fxP

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MVD4500

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DELTA 201

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MVD300E

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All KLA / SPTS PVD / CVD / ALD