ULVAC

G50SA 

PKS-016

CRYO-U20P

Cryopump that uses a two-stage type GM cryocooler, and is capable of high vacuum pumping.

CRYO-U8HSP

CRYO-U10PU

PRC-012A

LR3601-R

CRYO-U12H

LR90

DOP-301SB

CRYO-U12HSP

GLD-N201

VDN902

Speciality Cryopumps for Sputtering Process

CRYO-U10HSP

Multi-Stage Roots Type Dry Vacuum Pump - Pump is designed for CVD or dry etching applications / designed for PVD, evaporation, or heat treatment processes/designed to handle process gasses that generate powder by products such as Si crystal growing furnaces

LR300

Multi-Stage Roots Type Dry Vacuum Pump - Pump is designed for CVD or dry etching applications/designed for PVD, evaporation, or heat treatment processes/ designed to handle process gasses that generate powder by products such as Si crystal growing furnaces

UR1800

DA-120S

LR1800

UTM-150

PMB 006Cs

GCD-201X

DAL-181D

PMB-024C

CRYO-U10HL

VDN301

DOP-50S4V

DA-241S

DIS-251

PX-201N

LR600

CRYO-U6H

DA-30S

DA-60S

CRYO-U8HL

CRYO-U8H

Cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping

ULVAC

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Top ULVAC Pumps

G50SA

PKS-016

PRC-012A

CRYO-U8HSP

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