EBARA

A70W

A150W-T

A150W-M

A10S

150 X 40

A70WN	

AA40W

A30W

AA70W

AA20

AAE40WN

AA200W

40 X 20

AA200WN

80 X 25

AA20N

Vacuum Dry Pump AA20N-H, 200V, 50/60 Hz, Corrosian Resist, Horizontal Outlet, with Exhaust Pressure Sensor

AA20N-H

A300W	

AA30

150X40 UERP6M

AA10

AAS300WN

AA10N	

AAS200WN

ET600H-US

ESA70W

50 X 20

AA40WN

ET-600	

Vacuum Dry Pump AA20-H, 200V, 50/60 Hz, Horizontal Outlet

AA20-H

A30W-C

AA100W

A25S

ESR20N

ET-300W	

Pumping Speed: 1670 L/min
Ultimate Pressure: 5.0Pa

EV-S20P

AA70W-H

AA70WN

Technical Characteristics:
-DC Motor
-Low Energy consumption
-Complete pump safeguard system
-High pump operating temperature preventing condensation
-Low noise and low vibration

AAL10

A07V

Dry (oil free) vacuum pumps
Pumping Speed (60 Hz): 20,000 l/min

EST200WN

CS-22

AAS100WN

ESA25-D

ESDP 30	

150X40UERP6M-J

EMT2400MBWC	

Vacuum Dry Pump A07V-B, 200V, 50/60 Hz, Basic Version

A07V-B

150X40 UERP6M-U

A30W N

ET1600WS

50X20UERR6M

AA40WV1-H

AA70WN-H

UERR6M 50X20 

ESR200WN

ESR201W

AA100V1 H

IQDP 40

ESR100-CN

AA10V1

ET300WS	

UFP-100/150A

AA10NV1-H

Pumping speed (N2) l/min. 7000
Pumping speed (N2) m3/h 420
Ultimate pressure mbar 2x10-3
Ultimate pressure Pa 0.2
Water Consumption l/min 3.5-8
Nitrogen Consumption SLM 11-13
Nitrogen Consumption Pa m3/sec 19-22
Voltages ranges V 200-220/380-415
Motor power, installed kW 7.5
Weight, approx. kg 280
Sizes (LxWxH) mm 830x400x800
Inlet flange size DN 50 KF
Outlet flange size DN 40 KF

AAS70WN

EV-S20

A500W-T	

A150W

80x25UERR6M	

EV-A03-1

Dry (oil free) vacuum pumps
Pumping Speed (60 Hz): 30,000 l/min

EST500WN

ESR80WN

EST100WN

A200W

AA10Nv1	

EV-A10-2

40X20ERD5M

AA70WNV1-H

EV-A06-3

Typical applications for the Model ESR80W dry vacuum pump include load locks, SEM, Etch, CVD, PVD, Ashing and Ion Implant processes that require the best vacuum performance and optimum uptime.
Pumping Speed (60 Hz): 4,000~8,500 l/min

ESR80W

Pumping Speed: 1670 L/min
Ultimate Pressure: 5.0 Pa

EV-S20N

AA40WNV1-E

AAS20N

AA70WV1-H

EV-M102N	

40X20ERD5M-NJ

Dry Pump
Pumping Speed (60 Hz): 20,000 l/min

EV-S200P

EV-M502NS

Dry Pump
Pumping Speed (60 Hz): 30,000 l/min


ESA300W

AA30W

Dry (oil free) vacuum pumps 
Pumping Speed (60 Hz): 30,000 l/min

EST300WN

AA100W-H

A40W

ESR100WN

40×20 ERD5M-N

The ESA70W dry vacuum pump by Ebara is designed for light-gas applications like MOCVD. It offers options like dual voltage, alternate exhaust configurations, NiResist cast material, idle mode, seismic brackets, integrated rack solutions, installation lifts, and reusable shipping crates. It's perfect for medium to light-duty processes, hydrogen handling, large load-lock applications, and as a replacement for the A Series EBARA Model A70W pump.

ESA70W-D

The Model EV-M302N dry vacuum pumps are designed for high-load applications where large volumes of reaction byproducts are generated. Its outstanding power consumption performance and enhanced corrosion resistance, as a standard, support a broad range of industry applications.           

Options:
-Various Booster & Exhaust Thermal Configurations (Process Dependent)
-ESD Resistance
-Idle Mode (Green Energy Mode)
-Hardware: Seismic Brackets
-Pump Systems – Integrated Rack Solutions
-Pump Installation Lifts
-Reusable Shipping Crates

EV-M302N

EBARA

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A70W

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