Axcelis acquired Fusion Systems Corporation in August 1997.
Fusion is a leading worldwide supplier of single-wafer ashers and photostabilizers used in the fabrication of advanced semi- conductor devices.

The FUSION M150PC, manufactured by AXCELIS, is a photostabilizer system used in the semiconductor industry. It is designed to work with 6-inch wafer sizes. The system belongs to the Microlite 150 series and is known for its ability to provide a clean and efficient one-step process for hardening photoresists. It offers high production throughputs, making it suitable for semiconductor manufacturing applications where photoresist hardening is required

AXCELIS / FUSION

M150PC

The Fusion M200PC is a photostabilizer used in the semiconductor industry. It uses a special process to harden and impact high-temperature stability to photoresist materials on semiconductor wafers. Photostabilized wafers are capable of withstanding high temperature hard baking.

M200PC

M150PCU

The Fusion m200pcu is a Photostabilizer System made by Fusion Systems. It utilizes the standard dual unicassette wafer handling platform. The Fusion m200pcu is a single chamber DUV Photostabilizer with a wafer size of 8" or 6". It has shielded SECS cables and is used for UV Bake process applications. The irradiator contains an Hg High Intensity Lamp and 2.45 GHz magnetrons.

M200PCU

The Fusion M150 is a photoresist stabilization tool used for deep UV flood exposure and features a 150mm heated/water cooled wafer chuck.

M150

RAPIDCURE 320FC

The Fusion 200PCU PoLo is a product from Axcelis Technologies that offers a cost-effective single chamber solution for processing 125-200mm wafers. It features a rapid, one-step UV Bake™ Process that replaces the standard resist hardbake, allowing for higher process margins and increased consistency within dry etch and ion implantation sequences. This makes it a valuable tool for improving the efficiency and effectiveness of semiconductor manufacturing processes.

200 PCU

MICROLITE

M200 ACU

The FusionPS3 is a 300mm photostabilization system designed for photoresist curing, low-k curing, and non-volatile memory charge erasure. It supports the integration of advanced materials into mainstream device production and maximizes intermolecular reactions to deliver consistent and stable resist characteristics. The FusionPS3 incorporates leading-edge photoresist curing capabilities in a unique, dual-chamber platform, enabling simultaneous processing of different recipes. It guarantees maximum machine uptime, high productivity, and lower cost of ownership, meeting the stringent requirements of 300mm production capability.

FUSION PS3

The Fusion Gemini GPS is a UV Cure System made by Axcelis / Fusion. It has two 8" open cassette stations and a process chamber mWave PS: HV-SMPS. The system software (OS) is WinNT 4.0 SP 6 and the system software (App) is version 3.43.

GEMINI  GPS

200mm photostabilization system for photoresist curing.

GEMINI PS

150PC

The Fusion Gemini PCU is a photostabilizer used for advanced device manufacturing. It preserves CDs and boosts the performance of etch and implant processes.

AXCELIS / FUSION

Overview

Active Listings

Total Products

Services

Top AXCELIS / FUSION Photostabilizers

M150PC

8 Listings

M200PC

3 Listings

M150PCU

3 Listings

M150

2 Listings

List it with Moov and find the perfect buyer in no time at all.

All AXCELIS / FUSION Photostabilizers