UltraBeam model V2000 electron beam pattern generation system based on vector-scan technology for use in the development and production of photomasks for the IC industry.

Veeco Instruments Inc. a global leader of advanced thin film etch and deposition process equipment, acquired Ultratech, Inc. a leading supplier of lithography, laser-processing and inspection systems used to manufacture semiconductor devices and LEDs.


VEECO / ULTRATECH

V2000

ETEC

CORE 2564

ASYST

RMS 2150 INX/S	

Substrates: 
50mm - 200mm (round)
3inch - 9inch (square) piece chuck


SUSS MicroTec offers a wide product portfolio of high quality process solutions for the semiconductor industry and related markets. SUSS portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding, and photomask processing, complemented by micro-optical components. 

Photomask

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