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CANON FPA-2500i2
    Description
    No description
    Configuration
    Electrical: 3Ø AC 200V 50/60Hz Rated power: 18.7 KVA Reticle Size: 6", Canon STD Wafer Feeder: Type-L PA Unit: 6", O.F Type Chamber: TBW-CD60 Illuminator: FPA-2500 i line Console version: A Scope: i-line, TTL T/Z-Tilt Unit: 3 (L,M,R) Support Mount: Servo Passive Damper Lamp House: 1.5KW
    OEM Model Description
    The CANON FPA-2500i2 is a stepper system that can be used with a 6” reticle wafer size. It has a numerical aperture of 0.54 / 0.45 and an image field of 22 mm [(X)17mm x (Y)26mm]. The CANON FPA-2500i2 stepper has a printing wavelength of i-line (365 nm) and a resolution of 0.45 μm. It has an illumination lamp of 1.5 kW super-high-pressure mercury and an illumination uniformity of ≤ 1.2 %. It also has alignment modes of TTL Off-Axis He-Ne TV and TTL Off-Axis Broad Band TV with an alignment light source of He-Ne laser (633 nm) and Halogen lamp. Its alignment accuracy is ≤ 0.1 μm (mean + 3 σ) and its throughput is ≥ 52 wafers / hour (8”, 60 shot).
    Documents

    No documents

    CANON

    FPA-2500i2

    verified-listing-icon

    Verified

    CATEGORY
    Steppers & Scanners

    Last Verified: Over 60 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    47795


    Wafer Sizes:

    6"/150mm


    Vintage:

    1994


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    CANON FPA-2500i2

    CANON

    FPA-2500i2

    Steppers & Scanners
    Vintage: 1993Condition: Used
    Last VerifiedOver 60 days ago

    CANON

    FPA-2500i2

    verified-listing-icon
    Verified
    CATEGORY
    Steppers & Scanners
    Last Verified: Over 60 days ago
    listing-photo-730d2478056d4834a1f430ae2e8fa4b5-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1904/cd8a9d6f504c45e686b1152c3f7455b7/8cae71be5e754c1d8ccbc9143e5e102d_1e5a9935e8044e269affa45486b372e51201a_mw.jpeg
    listing-photo-730d2478056d4834a1f430ae2e8fa4b5-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1904/cd8a9d6f504c45e686b1152c3f7455b7/97cc17bfb27440cfb94dff69a41b862a_f99c9acb7e0043c7906fce443117a5ff1201a_mw.jpeg
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    listing-photo-730d2478056d4834a1f430ae2e8fa4b5-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1904/cd8a9d6f504c45e686b1152c3f7455b7/f1fb0c4df96848098a5ebf1c7250cd81_fd35b2556d504fceb064b6da4df226f51201a_mw.jpeg
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    listing-photo-730d2478056d4834a1f430ae2e8fa4b5-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1904/cd8a9d6f504c45e686b1152c3f7455b7/01e29fbb4a2c46cea440f58b421bbe81_2c494f50d36647c79b317c222b44c3001201a_mw.jpeg
    listing-photo-730d2478056d4834a1f430ae2e8fa4b5-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1904/cd8a9d6f504c45e686b1152c3f7455b7/250ca3ad06364865b2598725c6c8c4ad_f7ee9cbad49b4054a8090cda45eceaef1201a_mw.jpeg
    listing-photo-730d2478056d4834a1f430ae2e8fa4b5-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1904/cd8a9d6f504c45e686b1152c3f7455b7/20cd5ea3fbd142daa1a3e37a20a45333_daee847d17bd4492ac4a461bf299a4981201a_mw.jpeg
    listing-photo-730d2478056d4834a1f430ae2e8fa4b5-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1904/cd8a9d6f504c45e686b1152c3f7455b7/f39030338e11420489bfe89e536bed11_fe9178cd98d2471c89a9737b817da1a51201a_mw.jpeg
    listing-photo-730d2478056d4834a1f430ae2e8fa4b5-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1904/cd8a9d6f504c45e686b1152c3f7455b7/f47994e5f52945cb8853de8aa81c1ad0_86de75532f1b4b35baa45d5b3354185c1201a_mw.jpeg
    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    47795


    Wafer Sizes:

    6"/150mm


    Vintage:

    1994


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    No description
    Configuration
    Electrical: 3Ø AC 200V 50/60Hz Rated power: 18.7 KVA Reticle Size: 6", Canon STD Wafer Feeder: Type-L PA Unit: 6", O.F Type Chamber: TBW-CD60 Illuminator: FPA-2500 i line Console version: A Scope: i-line, TTL T/Z-Tilt Unit: 3 (L,M,R) Support Mount: Servo Passive Damper Lamp House: 1.5KW
    OEM Model Description
    The CANON FPA-2500i2 is a stepper system that can be used with a 6” reticle wafer size. It has a numerical aperture of 0.54 / 0.45 and an image field of 22 mm [(X)17mm x (Y)26mm]. The CANON FPA-2500i2 stepper has a printing wavelength of i-line (365 nm) and a resolution of 0.45 μm. It has an illumination lamp of 1.5 kW super-high-pressure mercury and an illumination uniformity of ≤ 1.2 %. It also has alignment modes of TTL Off-Axis He-Ne TV and TTL Off-Axis Broad Band TV with an alignment light source of He-Ne laser (633 nm) and Halogen lamp. Its alignment accuracy is ≤ 0.1 μm (mean + 3 σ) and its throughput is ≥ 52 wafers / hour (8”, 60 shot).
    Documents

    No documents

    Similar Listings
    View All
    CANON FPA-2500i2

    CANON

    FPA-2500i2

    Steppers & ScannersVintage: 1993Condition: UsedLast Verified:Over 60 days ago
    CANON FPA-2500i2

    CANON

    FPA-2500i2

    Steppers & ScannersVintage: 1993Condition: UsedLast Verified:Over 60 days ago
    CANON FPA-2500i2

    CANON

    FPA-2500i2

    Steppers & ScannersVintage: 1993Condition: UsedLast Verified:Over 60 days ago