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CANON FPA-2500i2
    Description
    No description
    Configuration
    Electrical: 3Ø AC 200V 50/60Hz Rated power: 18.7 KVA Reticle Size: 6", Canon STD Wafer Feeder: Type-L PA Unit: 6", O.F Type Chamber: TBW-CD60 Illuminator: FPA-2500 i line Console version: A Scope: i-line, TTL T/Z-Tilt Unit: 3 (L,M,R) Support Mount: Servo Passive Damper Lamp House: 1.5KW
    OEM Model Description
    The CANON FPA-2500i2 is a stepper system that can be used with a 6” reticle wafer size. It has a numerical aperture of 0.54 / 0.45 and an image field of 22 mm [(X)17mm x (Y)26mm]. The CANON FPA-2500i2 stepper has a printing wavelength of i-line (365 nm) and a resolution of 0.45 μm. It has an illumination lamp of 1.5 kW super-high-pressure mercury and an illumination uniformity of ≤ 1.2 %. It also has alignment modes of TTL Off-Axis He-Ne TV and TTL Off-Axis Broad Band TV with an alignment light source of He-Ne laser (633 nm) and Halogen lamp. Its alignment accuracy is ≤ 0.1 μm (mean + 3 σ) and its throughput is ≥ 52 wafers / hour (8”, 60 shot).
    Documents

    No documents

    CANON

    FPA-2500i2

    verified-listing-icon

    Verified

    CATEGORY
    Steppers & Scanners

    Last Verified: Over 60 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    47787


    Wafer Sizes:

    6"/150mm


    Vintage:

    1994


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    CANON FPA-2500i2

    CANON

    FPA-2500i2

    Steppers & Scanners
    Vintage: 1993Condition: Used
    Last VerifiedOver 60 days ago

    CANON

    FPA-2500i2

    verified-listing-icon
    Verified
    CATEGORY
    Steppers & Scanners
    Last Verified: Over 60 days ago
    listing-photo-47d90abc1e58465a85b07618b2aa7a6b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1904/cd8a9d6f504c45e686b1152c3f7455b7/e0d10e9e2a134f549ea73cbadd5dee7a_dfae72bc8bcc441bb9b16531e9e292da1201a_mw.jpeg
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    listing-photo-47d90abc1e58465a85b07618b2aa7a6b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1904/cd8a9d6f504c45e686b1152c3f7455b7/3558614f8b5d4abdafaad93ac776f91f_48eb9b05873e4ddcacf0d2b5fa69307c_mw.jpeg
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    listing-photo-47d90abc1e58465a85b07618b2aa7a6b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1904/cd8a9d6f504c45e686b1152c3f7455b7/dbb0ef4f084c4d9ba2b7709b57fdfa7f_bc40443e398e4862be354db5302e3f36_mw.jpeg
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    listing-photo-47d90abc1e58465a85b07618b2aa7a6b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/1904/cd8a9d6f504c45e686b1152c3f7455b7/efe821b8b21f4a7ca9281849c1f5f739_fa4b530fd90b4d4cadffa24c4b89f4c31201a_mw.jpeg
    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    47787


    Wafer Sizes:

    6"/150mm


    Vintage:

    1994


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    No description
    Configuration
    Electrical: 3Ø AC 200V 50/60Hz Rated power: 18.7 KVA Reticle Size: 6", Canon STD Wafer Feeder: Type-L PA Unit: 6", O.F Type Chamber: TBW-CD60 Illuminator: FPA-2500 i line Console version: A Scope: i-line, TTL T/Z-Tilt Unit: 3 (L,M,R) Support Mount: Servo Passive Damper Lamp House: 1.5KW
    OEM Model Description
    The CANON FPA-2500i2 is a stepper system that can be used with a 6” reticle wafer size. It has a numerical aperture of 0.54 / 0.45 and an image field of 22 mm [(X)17mm x (Y)26mm]. The CANON FPA-2500i2 stepper has a printing wavelength of i-line (365 nm) and a resolution of 0.45 μm. It has an illumination lamp of 1.5 kW super-high-pressure mercury and an illumination uniformity of ≤ 1.2 %. It also has alignment modes of TTL Off-Axis He-Ne TV and TTL Off-Axis Broad Band TV with an alignment light source of He-Ne laser (633 nm) and Halogen lamp. Its alignment accuracy is ≤ 0.1 μm (mean + 3 σ) and its throughput is ≥ 52 wafers / hour (8”, 60 shot).
    Documents

    No documents

    Similar Listings
    View All
    CANON FPA-2500i2

    CANON

    FPA-2500i2

    Steppers & ScannersVintage: 1993Condition: UsedLast Verified:Over 60 days ago
    CANON FPA-2500i2

    CANON

    FPA-2500i2

    Steppers & ScannersVintage: 1993Condition: UsedLast Verified:Over 60 days ago
    CANON FPA-2500i2

    CANON

    FPA-2500i2

    Steppers & ScannersVintage: 1993Condition: UsedLast Verified:Over 60 days ago