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KLA ALPHA-STEP IQ
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    KLA

    ALPHA-STEP IQ

    Category
    Metrology

    Created: August 10, 2021

    Verified

    Last Verified: Over 60 days ago

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    Key Item Details

    Condition: As Is

    Product ID: 43429

    Wafer Sizes:

    Vintage: Unknown

    Description

    Measurement of vertical features ranging from under 100 Å (0.4 μin.) to approximately 0.4mm (15.7 mils), with a vertical resolution of 0.012 Å or 0.24 Å respectively. The horizontal resolution is only limited by the stylus radius and not by the number of data points. However, the minimum spacing between two data points is 0.01 μm. Measurement of many roughness and waviness parameters with roughness and waviness separated by user selectable cutoff filters. Ability to fit and level data, allowing accurate measurements on curved surfaces. Ability to repeat a scan up to ten times and automatically calculate the average, thereby minimizing the effects of environmental noise on measurements. Accommodation of samples up to 150 mm (6 in.) wide and 21 mm (.83 in.) thick.

    Configuration

    The Alpha‐Step IQ Profiler is a highly sensitive, computerized surface profiler that measures roughness, undulation, and step height in a variety of applications. It features the ability to measure micro‐roughness over short distances with up to 1Å (0.1 nm) or less resolution, as well as the undulation of a sample up to 10 mm (0.4 in) long. The computer offers powerful measurement control, data storage, analysis, and networking.

    OEM Model Description

    The Alpha-Step IQ takes the proven performance of the Alpha-Step 500 and adds new USB electronics and completely redesigned software to significantly improve the ease-of-use and provide enhanced scan sequencing and data analysis capability.

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