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KLA ALPHA-STEP 300
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    KLA

    ALPHA-STEP 300

    Category
    Metrology

    Created: May 11, 2022

    Verified

    Last Verified: Over 60 days ago

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    Key Item Details

    Condition: As Is

    Product ID: 57787

    Wafer Sizes:

    Vintage: Unknown

    Description

    Profilometer

    Configuration

    Date of Mfg: 4/92 ±10 mm Scan Length 2 to 250 µm/sec Scan Speed 50/sec nominal Sampling Rate Vertical Resolution 1Å Resolution ±6.5 µm 25Å Resolution ±150µm 1.0-100 mg Stylus Programmable Force Range 0.1 mg Stylus Programmable Force Resolution 210 mm X, Y Maximum Travel 254 x 254 mm Maximum Sample Size

    OEM Model Description

    None Provided

    Other Information
    No Other Information Provided
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