Used TEL / TOKYO ELECTRON UNITY EP for Sale | Moov

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TEL / TOKYO ELECTRON UNITY EP

Description

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OEM Model Description

The UNITY®-EP CVD system is a state-of-the-art tool for high volume manufacturing of integrated circuits. It is based on the field-proven UNITY CVD process and offers productivity enhancements for CVD metal films. The system is designed to be space-efficient and easy to maintain, with improved process stability through the use of an upgraded heater temperature control (PCOT). The system can handle wafer sizes of 150mm and 200mm, with 1 to 4 process modules and 1 or 2 cooling modules. It can perform pre-clean, Ti, TiN processes and features plasma-free cleaning. This makes it a versatile and reliable tool for the semiconductor industry.

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TEL / TOKYO ELECTRON

UNITY EP

verified-listing-icon

Verified

CATEGORY

Plasma Etch

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

55786

Wafer Sizes:

Unknown

Vintage:

Unknown

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TEL / TOKYO ELECTRON UNITY EP

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TEL / TOKYO ELECTRON

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verified-listing-icon

Verified

CATEGORY

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Last Verified: Over 60 days ago

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Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

55786

Wafer Sizes:

Unknown

Vintage:

Unknown

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OEM Model Description

The UNITY®-EP CVD system is a state-of-the-art tool for high volume manufacturing of integrated circuits. It is based on the field-proven UNITY CVD process and offers productivity enhancements for CVD metal films. The system is designed to be space-efficient and easy to maintain, with improved process stability through the use of an upgraded heater temperature control (PCOT). The system can handle wafer sizes of 150mm and 200mm, with 1 to 4 process modules and 1 or 2 cooling modules. It can perform pre-clean, Ti, TiN processes and features plasma-free cleaning. This makes it a versatile and reliable tool for the semiconductor industry.

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Plasma EtchVintage: 0Condition: UsedLast Verified: Over 30 days ago