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TEL / TOKYO ELECTRON TELIUS SP 305 SCCM
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:48837

    Wafer Sizes:12"/300mm

    Vintage:2005

    Description

    Dielectric Etch

    Configuration

    No Configuration

    Documents
    No documents
    OEM Model Description

    Telius-SP is a high-performance etching system designed for large diameter (300 mm) requirements. It is part of the Telius platform and offers improved productivity through increased throughput, a reduced footprint, and higher energy efficiency. The system can be fitted with various chamber applications, including DRM and SCCM chambers, to support a wide range of process areas. It can support up to 4 chambers and boasts a high throughput, compact design, and low cost of ownership (CoO). Additionally, the system is designed for ease of maintenance. Overall, Telius-SP is a versatile and cost-effective solution for large diameter etching needs.

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