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TEL / TOKYO ELECTRON TACTRAS VIGUS
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:61236

    Wafer Sizes:8"/200mm

    Vintage:Unknown

    Description

    WET ETCH

    Configuration

    No Configuration

    Documents
    No documents
    OEM Model Description

    Tactras™ Vigus™ is a highly reliable 300mm plasma etch system that enhances etch process productivity. It provides customized options for high aspect ratio holes, trench etch, mask and dielectric etch, and BEOL. The system is designed to deliver excellent wafer uniformity, low wafer-to-wafer variation, and high selectivity for thin film stop layers while maintaining a high etch rate. Up to 6 Vigus™ chambers can be installed on the Tactras™ platform. Tactras™ Vigus™ contributes to maximizing productivity for semiconductor manufacturers with industry-leading tool availability by minimizing offset in machine-to-machine and chamber-to-chamber with robust design, particle reduction techniques, introducing unit-assembly inspection method before shipment, and unique labor-saving automated functions. Overall, Tactras™ Vigus™ is a highly efficient and versatile etching system that offers many benefits to its users.

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