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TEL / TOKYO ELECTRON ALPHA-8S
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    TEL / TOKYO ELECTRON

    ALPHA-8S

    Created: April 27, 2022

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    Last Verified: 26 days ago

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    Key Item Details

    Condition: As Is

    Product ID: 57278

    Wafer Sizes:

    Vintage: Unknown

    Description

    No Description

    Configuration

    Heater: VMU-40-007 Torch Trans LC Pressure: ATM Gases: N2 P N2 02 H2

    OEM Model Description

    ALPHA-8S is the long-seller batch thermal processing system for silicon wafers up to 200mm. Maximizing the efficiency and productivity through continuous improvement, as a result, ALPHA-8S set the standard for vertical furnace. The system provides a wide range of process applications such as Wet/Dry Oxidation, Anneal, LPCVD of Si, Si3N4 and SiO2. Various type of UGK (Up Grade Kit) are available, which include a GUI controller and other options to enhance its productivity and expand the product’s life.

    Other Information
    No Other Information Provided
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