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    Created: April 27, 2022


    Last Verified: Over 60 days ago

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    Key Item Details

    Condition: As Is

    Product ID: 57261

    Wafer Sizes:

    Vintage: Unknown


    No description available


    Heater: VMU-40-007 Torch Trans LC Pressure ATM Gases: P N2 02 H2

    OEM Model Description

    ALPHA-8S is the long-seller batch thermal processing system for silicon wafers up to 200mm. Maximizing the efficiency and productivity through continuous improvement, as a result, ALPHA-8S set the standard for vertical furnace. The system provides a wide range of process applications such as Wet/Dry Oxidation, Anneal, LPCVD of Si, Si3N4 and SiO2. Various type of UGK (Up Grade Kit) are available, which include a GUI controller and other options to enhance its productivity and expand the product’s life.

    Other Information
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