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TEL / TOKYO ELECTRON ALPHA-8S
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:57261

    Wafer Sizes:Unknown

    Vintage:Unknown

    Description

    No description available

    Configuration

    Heater: VMU-40-007 Torch Trans LC Pressure ATM Gases: P N2 02 H2

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    OEM Model Description

    The ALPHA-8S is a popular batch thermal processing system for silicon wafers up to 200mm in size. It has been continuously improved to maximize efficiency and productivity, setting the standard for vertical furnaces. The system is versatile, supporting a wide range of process applications such as Wet/Dry Oxidation, Anneal, and LPCVD of Si, Si3N4, and SiO2. Additionally, various types of Up Grade Kits (UGK) are available to enhance productivity and extend the product’s life, including a GUI controller and other options

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