ASM is a supplier of semiconductor process equipment for wafer processing, including lithography, deposition, ion implant and single-wafer epitaxy. ASM is part of the ASM International NV group that also includes ASM Pacific Technology (ASMPT). ASMPT, in which ASMI holds a substantial ownership is a leading supplier of semiconductor process equipment for wafer assembly and packaging, and for surface mount technology.



The ASM A412 is a vertical furnace system with a proven track record of more than 1,000 reactors shipped to customers worldwide and over 22 years of maturity in semiconductor manufacturing.

A412

The ASM AD400 is a diffusion and oxidation furnaces system used in semiconductor manufacturing. It is designed for processing 8-inch wafers with dual tubes or 6-inch wafers with dual boats. The system's body is anodized to resist corrosion, ensuring durability and reliability during wafer processing. 

A400

MIR 3000

A600

The A4ALD is an Advance® 400 Series reactor module specifically designed for ALCVD, ASM’s atomic layer deposition technology. The A4ALD merges the technological expertise of ASM’s Pulsar®, its single-wafer platform for ALCVD, and the Advance 400 Series vertical furnaces to create a cost-effective batch solution targeted mainly for dielectric capacitor market. Situating ALCVD in a vertical batch furnace allows for a higher throughput, as up to 100 wafers can be processed simultaneously. This is particularly beneficial for thicker layer films, such as the ones used for MIM capacitors. 

A4ALD

A300

The ASM A400XT is a high-performance 200mm vertical furnace with significantly improved capabilities compared to other similar furnaces in the market. It boasts an impressive 30-40% higher performance level, making it a highly efficient and productive tool for various thermal processing applications in semiconductor manufacturing. The A400XT's advanced features and enhanced performance contribute to increased throughput and improved process results, making it a valuable asset for semiconductor fabrication facilities.

A400XT

​​The Advance is our comprehensive range of batch vertical furnaces optimized to meet the needs of advanced semiconductor applications. Vertical batch processing increases productivity because a large stac​k of wafers can be loaded into the furnace chamber for simultaneous thermal processing.The A412 PLUS is for 300mm wafers.

A412 Plus

A600-UHV

The ASM A400 DUO Die Sorter is a machine developed by ASM Assembly Systems, a division of ASM Pacific Technology Ltd., a leading supplier of semiconductor assembly and packaging equipment. The A400 DUO Die Sorter is designed for the high-speed sorting and handling of semiconductor dies, which are individual integrated circuit components.

ASM

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Top ASM Diffusion and Oxidation Furnaces

A412

19 Listings

A400

7 Listings

MIR 3000

3 Listings

A600

2 Listings

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All ASM Diffusion and Oxidation Furnaces