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Marketplace > Coaters & Developers > TEL / TOKYO ELECTRON > MARK II
TEL / TOKYO ELECTRON MARK II
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:64535

    Wafer Sizes:6"/150mm

    Vintage:1989

    Description

    Developer

    Configuration

    2D

    Documents
    No documents
    OEM Model Description

    The CLEAN TRACK™ Mark-II is a coater/developer system developed by TEL. It is an advanced version of the first domestic model, the CLEAN TRACK™ Mark, which was based on a photoresist system developed and manufactured in the US. The Mark-II was able to transition to larger wafer sizes of up to 6 inches and featured an advanced controller. Through multiple efforts, such as introducing in-line models with exposure tools, the system’s productivity was continuously improved.

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