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TEL / TOKYO ELECTRON LITHIUS Pro-i
    Description
    COT/DEV
    Configuration
    No Configuration
    OEM Model Description
    The CLEAN TRACK™ LITHIUS Pro™/LITHIUS Pro™ ｰi is a 300mm process coater/developer that offers enhanced productivity and a significantly decreased footprint. It supports advanced immersion lithography through innovative modules and integrated metrology for advanced process control solutions. This platform improves upon the core track concepts of OEE (Overall Equipment Efficiency) and lower CoO (Cost of Ownership). In summary, the CLEAN TRACK™ LITHIUS Pro™/LITHIUS Pro™ ｰi is a highly efficient and cost-effective solution for advanced immersion lithography.
    Documents

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    TEL / TOKYO ELECTRON

    LITHIUS Pro-i

    verified-listing-icon

    Verified

    CATEGORY

    Coaters & Developers
    Last Verified: Over 60 days ago
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    49020

    Wafer Sizes:

    12"/300mm

    Vintage:

    2007

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    Logistics Support
    Available
    Money Back Guarantee
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    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
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    TEL / TOKYO ELECTRON

    LITHIUS Pro-i

    verified-listing-icon

    Verified

    CATEGORY

    Coaters & Developers
    Last Verified: Over 60 days ago
    listing-photo-1d3f861505344871aedd29643adbdd46-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    49020

    Wafer Sizes:

    12"/300mm

    Vintage:

    2007

    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    COT/DEV
    Configuration
    No Configuration
    OEM Model Description
    The CLEAN TRACK™ LITHIUS Pro™/LITHIUS Pro™ ｰi is a 300mm process coater/developer that offers enhanced productivity and a significantly decreased footprint. It supports advanced immersion lithography through innovative modules and integrated metrology for advanced process control solutions. This platform improves upon the core track concepts of OEE (Overall Equipment Efficiency) and lower CoO (Cost of Ownership). In summary, the CLEAN TRACK™ LITHIUS Pro™/LITHIUS Pro™ ｰi is a highly efficient and cost-effective solution for advanced immersion lithography.
    Documents

    No documents

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    View All
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