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TEL / TOKYO ELECTRON ACT 12
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:12018

    Wafer Sizes:8"/200mm

    Vintage:2000

    Description

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    OEM Model Description

    The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.

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